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반도체용 Blank Mask 제품 포트폴리오
6025 Blank Mask (6인치 · 152mm)Product List
6 types| Type | Product (Code) | Thickness | ||
|---|---|---|---|---|
| MoSi Layer | Cr Layer | Resist | ||
| Binary | Nomal Cr (SBN)Thin Cr (SBN) Optic-PREB-PRCAR | - | 66nm ~ 100nm | 66nm ~ 100nm |
| PSM | 6% KrF (SK6)6% ArF (SA6) Thin CrThinner CrThinner Cr2 CAR | 67nm ~ 87nm | 46nm ~ 66nm | 150nm ~ 300nm |
| OMOG | MoSi (SHB01) H/M(M) | 470nm | 4nm | - |
| Advanced PSM | 6% ArF (SA6) High E/R Cr AHigh E/R Cr B Advanced CAR | 67nm | 48nm ~ 53nm | 100nm ~ 150nm |
| HM PSM | 6% ArF (SA6) High E/R Cr BHigh E/R Cr C | 67nm | 51nm ~ 53nm | - |
| ETC | TM (I-line) | - | - | - |