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PRODUCT LIST (6025 BLANK MASK )
| TYPE | PRODUCT(CODE) | THICKNESS | ||
|---|---|---|---|---|
| MoSi Layer | Cr Layer | Resist | ||
| Binary | 66nm ~ 100nm | 66nm ~ 100nm | ||
| PSM | 65nm ~ 87nm | 38nm ~ 66nm | 150nm ~ 300nm | |
| Hard Mask | 47nm ~ 60nm | 4nm ~ 5nm | 60nm ~ 100nm | |
| Advanced PSM | 55nm ~ 75nm | 34nm ~ 66nm | 200nm 100nm ~ 150nm 60nm~80nm |
|
| High T% PSM | 58nm ~ 70nm/125nm | 49nm ~ 70nm | 60nm ~ 100nm | |
| ETC | TM(G&I-Line) | |||
PRODUCT LIST (FPD BLANK MASK)
| PLATE SIZE (mmxmm) | SUBSTRATE THICKNESS | CHAMFER TYPE | EDGE MASKING | PRODUCT TYPE |
|---|---|---|---|---|
| 520x800 | 10T | Normal Chamfer | Available |
→ Binary Blank Mask (OD3.2/5.0/LR) → Halftone TM → Multi-tone TM → Cr PSM → MoSi PSM |
| 700x800 | 8T | Normal Chamfer | Available | |
| 800x920 | 8T, 10T | Normal / Large Chamfer | Available | |
| 800x945 | 10T | Normal Chamfer | Available | |
| 800x960 | 8T, 10T | Normal Chamfer | Available | |
| 700x1100 | 10T | Normal Chamfer | Available | |
| 850x1200 | 10T | Normal / Large Chamfer | Available | |
| 850x1400 | 10T | Normal / Large Chamfer | Available | |
| 980x1150 | 13T | Normal Chamfer | Available | |
| 980x1550 | 13T | Normal / Large Chamfer | Available | |
| 1220x1400 | 13T | Normal / Large Chamfer | Available | |
| 1220x1500 | 13T | Large Chamfer | Available | |
| 1620x1780 | 17T | Normal / Large Chamfer | Available |