PRODUCT PORTFOLIO
FPD Blank Mask Product Portfolio
A lineup of blankmask for display (flat panel) processes. Check the plate size, substrate thickness, and chamfer specifications along with the product types at a glance.
≤ 8 GenerationPlate Specification
11 sizes| Plate Size (mm × mm) | Substrate Thickness (mm) | Chamfer Type |
|---|---|---|
| 520 × 800 | 10 T | Normal chamfer |
| 700 × 800 | 8 T | Normal / Large chamfer |
| 800 × 920 | 8 T, 10 T | Normal / Large chamfer |
| 800 × 945 | 10 T | Normal chamfer |
| 800 × 960 | 8 T, 10 T | Normal / Large chamfer |
| 850 × 1200 | 10 T | Normal / Large chamfer |
| 850 × 1400 | 10 T | Normal / Large chamfer |
| 980 × 1150 | 13 T | Normal chamfer |
| 980 × 1550 | 10 T | Normal chamfer |
| 1220 × 1400 | 13 T | Normal / Large chamfer |
| 1220 × 1500 | 13 T | Large chamfer |
Product Type
Binary Blank Mask
OD 3.2 / 5.0DAR (Double Anti-reflective)
Halftone TM (HTM)
Cr baseTop Type / Bottom Type
Phase Shift Mask
Cr baseMoSi Base
Multi-tone TM (MTM)
Remark
With & without resist — by request of customer
※ The specifications above are subject to change at the customer's request. For details, please contact our sales team.